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Spectroscopic study of unique line broadening and inversion in low-pressure microwave generated water plasmas

机译:低压微波产生的水等离子体中独特的谱线加宽和反演的光谱研究

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摘要

It was demonstrated that low pressure (~0.2 Torr) water vapor plasmas generated in a 10 mm inner diameter quartz tube with an Evenson microwave cavity show at least two features which are not explained by conventional plasma models. First, significant (> 0.25 nm) hydrogen Balmer_ line broadening, of constant width, up to 5 cm from the microwave coupler was recorded. Only hydrogen, and not oxygen, showed significant line broadening. This feature, observed previously in hydrogen-containing mixed gas plasmas generated with high voltage dc and rf discharges was explained by some researchers to result from acceleration of hydrogen ions near the cathode. This explanation cannot apply to the line broadening observed in the (electrodeless) microwave plasmas generated in this work, particularly at distances as great as 5 cm from the microwave coupler. Second, inversion of the line intensities of both the Lyman and Balmer series, again, at distances up to 5 cm from the coupler, were observed. The line inversion suggests the existence of a hitherto unknown source of pumping of the optical power in plasmas. Finally, it is notable that other aspects of the plasma including the OH* rotational temperature and low electron concentrations are quite typical of plasmas of this type.
机译:事实证明,在带有Evenson微波腔的内径10 mm石英管中产生的低压(〜0.2 Torr)水蒸气等离子体具有至少两个特征,传统等离子体模型无法解释。首先,记录到距微波耦合器长达5 cm的恒定宽度的显着(> 0.25 nm)氢Balmer_线加宽。仅氢而不是氧显示出明显的线展宽。一些研究人员解释说,先前在高压直流和射频放电产生的含氢混合气体等离子体中观察到的这一特征是由于阴极附近氢离子加速而产生的。该解释不适用于在这项工作中产生的(无电极)微波等离子体中观察到的线展宽,特别是在距微波耦合器5 cm的距离处。其次,在距耦合器最多5 cm处,再次观察到Lyman和Balmer系列的线强度反转。线反转表明存在迄今未知的等离子体中的光功率泵浦源。最后,值得注意的是,等离子体的其他方面(包括OH *旋转温度和低电子浓度)是此类等离子体的典型特征。

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